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Materials and processes for submicron technologies : proceedings of symposium N on materials and processes for Submicron technologies of the E-MRS spring conference, Strasbourg, France, 16-19 June 1998

Materials and processes for submicron technologies : proceedings of symposium N on materials and processes for Submicron technologies of the E-MRS spring conference, Strasbourg, France, 16-19 June 1998 edited by J.M. Martinez-Duart, R. Madar, R.A. Levy - Amsterdam Elsevier 1999 - 1002-1175 p. : ill. ; 29 cm

Repr. from Solid state electronics, v.43/6. Includes bibliographical references

ISBN: 9780080436173

ISSN: 689049

Subjects--Topical Terms:
Electron transport - Congresses
Microstructure - Congresses
Semiconductors - Congresses

Dewey Class. No.: 621.38152 MAR

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Materials and processes for submicron technologies : proceedings of symposium N on materials and processes for Submicron technologies of the E-MRS spring conference, Strasbourg, France, 16-19 June 1998

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