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Process, equipment, and materials control in integrated circuit manufacturing V : 22-23 September, 1999, Santa Clara, California

Process, equipment, and materials control in integrated circuit manufacturing V : 22-23 September, 1999, Santa Clara, California Anthony J. Toprac, Kim Dang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, the Electrochemical Society ... [et al.] - Bellingham, WA SPIE c1999 - vii, 310 p. : ill. ; 28 cm

Includes bibliographical references and index

ISBN: 9780819434791

ISSN: 710613

Subjects--Topical Terms:
Dielectric films - Congresses
Integrated circuits - Design and construction - Congresses
Metallizing - Congresses
Plasma etching - Congresses
Process control - Congresses

Dewey Class. No.: 621.3815 top

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Process, equipment, and materials control in integrated circuit manufacturing V : 22-23 September, 1999, Santa Clara, California

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