Proceedings of the 7th international autumn meeting gettering and defect engineering in semiconductor technology : GADEST '97, Spa, Belgium, October 5-10, 1997

Proceedings of the 7th international autumn meeting gettering and defect engineering in semiconductor technology : GADEST '97, Spa, Belgium, October 5-10, 1997 editors, and C. Claeys ... [et al.] - Zurich ; Enfield, N.H Scitec Pub. Ltd. ; Trans Tech Pub. Ltd. [distributor] [1997] - xv, 538 p. : ill. ; 25 cm

Includes bibliographical references and index

9783908450276

99221384


Electrical engineering - Materials - Congresses
Getters - Congresses
Semiconductors - Congresses
Silicon crystals - Defects - Congresses

537.622 CLA

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