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Multilevel interconnect technology III : 22-23 September 1999, Santa Clara, California

Multilevel interconnect technology III : 22-23 September 1999, Santa Clara, California Mart Graef, Divyesh N. Patel, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, the Electrochemical Society ... [et al.] - Bellingham, WA SPIE c1999 - ix, 184 p. : ill. ; 28 cm

Includes bibliographical references and index

ISBN: 819434809

ISSN: 266007

Subjects--Topical Terms:
Dielectric films - Congresses
Integrated circuits - Very large scale integration - Design and construction - Congresses
Metallizing - Congresses
Plasma etching - Congresses

Dewey Class. No.: TK7874.75 .M86 1999 621.39/5

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Multilevel interconnect technology III : 22-23 September 1999, Santa Clara, California

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