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Plasma properties, deposition and etching

Plasma properties, deposition and etching editors, J.J. Pouch and S.A. Alterovitz - Zurich, Switerland Trans Tech Publications c1993 - x, 742 p. : ill. ; 25 cm

Includes bibliographical references and index

ISBN: 9780878496709

Subjects--Topical Terms:
Plasma diagnostics
Plasma dynamics
Plasma etching

Dewey Class. No.: 621.044 POU

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Plasma properties, deposition and etching

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