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Plasma electronics : applications in microelectronic device fabrication

Makabe, T

Plasma electronics : applications in microelectronic device fabrication T. Makabe, Z. Petrović - New York Taylor & Francis c2006 - 339 p. : ill. ; 25 cm

Includes bibliographical references and index

ISBN: 9780750309769

ISSN: 2005056888

Subjects--Topical Terms:
Plasma engineering

Dewey Class. No.: 621.044 MAK

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