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Advances in rapid thermal and integrated processing

Advances in rapid thermal and integrated processing edited by Fred Roozeboom - Boston Kluwer Academic Publishers 1996 - xii, 565 p. : ill. ; 25 cm

Includes bibliographical references and index

ISBN: 9780792340119

ISSN: 96013321

Subjects--Topical Terms:
Rapid thermal processing - Congresses
Semiconductors - Heat treatment - Congresses

Dewey Class. No.: 621.3815 ROO

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Advances in rapid thermal and integrated processing

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