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Advances in metrology for x-ray and EUV optics : 2-3 August, 2005, San Diego, California, USA

Advances in metrology for x-ray and EUV optics : 2-3 August, 2005, San Diego, California, USA Lahsen Assoufid, Peter Z. Takacs, John S. Taylor, chairs/editors, ; sponsored and published by SPIE--the International Society for Optical Engineering - Bellingham, Wash SPIE c2005 - 1 v. (various pagings) : ill. ; 28 cm

Includes bibliographical references and author index

ISBN: 9780819459268

ISSN: 2005284398

Subjects--Topical Terms:
Laser interferometers - Congresses
Measurement - Congresses
Measuring instruments - Design and construction - Congresses
Optical instruments - Design and construction - Congresses
Optical measurements - Congresses

Dewey Class. No.: 681.25 ASS

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Advances in metrology for x-ray and EUV optics : 2-3 August, 2005, San Diego, California, USA

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