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Sub-half-micron lithography for ULSIs

Sub-half-micron lithography for ULSIs edited by Katsumi Suzuki, Shinji Matsui, and Yukinori Ochiai - Cambridge Cambridge University Press 2000 - xvii, 323 p. : ill. ; 25 cm

Includes bibliographical references and index

ISBN: 9780521022347

ISSN: 99013558

Subjects--Topical Terms:
Integrated circuits - Ultra large scale integration - Design and construction
Microlithography
Printed circuits - Design and construction

Dewey Class. No.: 621.395 SUZ

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Sub-half-micron lithography for ULSIs

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