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Optical micro- and nanometrology in microsystems technology : 5-7 April 2006, Strasbourg, France

Optical micro- and nanometrology in microsystems technology : 5-7 April 2006, Strasbourg, France Christophe Gorecki, Anand K. Asundi, Wolfgang Osten, chairs/editors ; sponsored by SPIE Europe ; cosponsored by Conseil general du Bas-Rhin (France)... [et al. ] ; cooperating organizations CNOP--Comité national d'optique et de photonique (France)... [et al. ] - Bellingham, WA SPIE 2006 - 1 v. (various pagings) : ill. ; 28 cm

Includes bibliographical references and author index

ISBN: 9780819462442

ISSN: 2007271570

Subjects--Topical Terms:
Metrology - Congresses
Microscopy - Congresses
Optical measurements - Congresses
Optical measurements - Industrial applications - Congresses
Photonics - Congresses

Dewey Class. No.: 681.25 GOR

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Optical micro- and nanometrology in microsystems technology : 5-7 April 2006, Strasbourg, France

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