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Micro electro mechanical system design

Allen, James J

Micro electro mechanical system design James J. Allen - Baca Raton, FL Taylor & Francis 2005 - [xxvi], 465 p. : ill. ; 24 cm

Includes bibliographical references and index

ISBN: 9780824758240 ; 0824758242

ISSN: 2005041771

Subjects--Topical Terms:
Conception technique
Engineering design
Microelectromechanical systems - Design and construction

Dewey Class. No.: 621.381 ALL

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