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Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and applications

Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and applications edited by Krishna Seshan - 2nd ed - Park Ridge, NJ Noyes Publications 2002 - xxviii, 629 p. : ill. ; 24 cm

Includes bibliographical references and index

ISBN: 9780815514428

Subjects--Topical Terms:
Chemical vapor deposition - Handbooks, manuals, etc
Thin film devices - Design and construction - Handbooks, manuals, etc
Thin films - Handbooks, manuals, etc

Dewey Class. No.: 621.38152 SES

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