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20th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 12-14 January 2004, Dresden, Germany

20th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 12-14 January 2004, Dresden, Germany Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI-Society Microelectronics, Micro- and Precision Engineering (GMM) (Germany) [and] Institute for Microstructure Technology/Forschungszentrum Karlsruhe (Germany) ; cooperating organizations, SEMI Europe ..[et al.] - Bellingham, WA SPIE c2004 - xxiv, 210 p. : ill. ; 28 cm.

Includes bibliographical references and index

ISBN: 9780819454379

Subjects--Topical Terms:
Integrated circuits - Masks - Congresses
Microlithography - Congresses

Dewey Class. No.: 621.3815 BEH

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20th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 12-14 January 2004, Dresden, Germany

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