Normal view MARC view ISBD view

18th European Conference on Mask Technology for Integrated Circuits and Microcomponents : proceedings : 15-16 January, 2002, Munich, Germany

18th European Conference on Mask Technology for Integrated Circuits and Microcomponents : proceedings : 15-16 January, 2002, Munich, Germany Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI--Society Microelectronics, Micro- and Precision Engineering (GMM) ..[et al. ; published by SPIE--The International Society for Optical Engineering] - Bellingham, WA SPIE c2002 - xiii, 256 p. : ill. ; 28 cm.

Includes bibliographical references and index

ISBN: 9780819445315

Subjects--Topical Terms:
Integrated circuits - Masks - Congresses
Microlithography - Congresses

Dewey Class. No.: 621.3815 BEH

Print
Save record
BIBTEX Dublin Core MARCXML MARC (non-Unicode/MARC-8) MARC (Unicode/UTF-8) MARC (Unicode/UTF-8, Standard) MODS (XML) RIS ISBD
More searches

Search for this title in:
Other Libraries (WorldCat) Other Databases (Google Scholar) Online Stores (Bookfinder.com) Open Library (openlibrary.org)

18th European Conference on Mask Technology for Integrated Circuits and Microcomponents : proceedings : 15-16 January, 2002, Munich, Germany

Find us on the map