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17th European Conference on Mask Technology for Integrated Circuits and Microcomponents : proceedings : 13-14 November 2000, Munich, Germany

17th European Conference on Mask Technology for Integrated Circuits and Microcomponents : proceedings : 13-14 November 2000, Munich, Germany Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI-Society and Institute for Microstructure Technology (GMM) (Germany) ; published by, SPIE--The International Society for Optical Engineering - Bellingham, WA SPIE c2001 - x, 192 p. : ill. ; 28 cm.

Includes bibliographical references and index

ISBN: 9780819440396

Subjects--Topical Terms:
Integrated circuits - Masks - Congresses
Microlithography - Congresses

Dewey Class. No.: 621.3815 BEH

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17th European Conference on Mask Technology for Integrated Circuits and Microcomponents : proceedings : 13-14 November 2000, Munich, Germany

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