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Instrumentation, metrology, and standards for nanomanufacturing III : 3-5 August 2009, San Diego, California, United States

Instrumentation, metrology, and standards for nanomanufacturing III : 3-5 August 2009, San Diego, California, United States Michael T. Postek, John A. Allgair, editors ; sponsored by SPIE ; technical cosponsor, NIST--National Institute of Standards and Technology (United States) - Bellingham, WA SPIE 2009 - ix, 1 v. (various pagings) : ill. ; 28 cm

Includes bibliographical references and index

ISBN: 9780819476951

ISSN: 2010286669

Subjects--Topical Terms:
Microfabrication - Congresses
Nanostructured materials - Congresses
Nanotechnology - Congresses

Dewey Class. No.: 620.5 POS

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