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Handbook of VLSI microlithography : principles, technology, and applications

Handbook of VLSI microlithography : principles, technology, and applications [edited] by John N. Helbert - 2nd ed - Park Ridge, NJ Noyes Publications/William Andrew Pub 2001 - xxi, 1001 p. : ill. ; 24 cm

Includes bibliographical references and index

ISBN: 9780815514442

ISSN: 28173

Subjects--Topical Terms:
Integrated circuits - Very large scale integration
Microlithography

Dewey Class. No.: 621.381531 HEL

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