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Handbook of silicon wafer cleaning technology

Handbook of silicon wafer cleaning technology edited by Karen A. Reinhardt, Werner Kern - 2nd ed - Norwich, NY William Andrew 2008 - xxvi, 718 p. : ill. ; 24 cm

Includes bibliographical references and index

ISBN: 9780815515548

ISSN: 2007037151

Subjects--Topical Terms:
Silicon-on-insulator technology

Dewey Class. No.: 621.38152 REI

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Handbook of silicon wafer cleaning technology

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