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NEMS/MEMS technology and devices : selected peer reviewed papers from the international conference on materials for advanced technologies 2009, symposium L, 28 June - 3 July, Singapore

NEMS/MEMS technology and devices : selected peer reviewed papers from the international conference on materials for advanced technologies 2009, symposium L, 28 June - 3 July, Singapore edited by Selin Teo ... [et al.] - Stafa-Zurich Trans Tech Publications c2009 - xi, 348 p. : ill. ; 25 cm

Includes bibliographical references and indexes

ISBN: 9780878493210

ISSN: 2010487145

Subjects--Topical Terms:
Microelectromechanical systems - Congresses
Nanoelectromechanical systems - Congresses

Dewey Class. No.: 621.381 TEO

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NEMS/MEMS technology and devices : selected peer reviewed papers from the international conference on materials for advanced technologies 2009, symposium L, 28 June - 3 July, Singapore

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