Gettering and defect engineering in the semiconductortechnology : GADEST '89 : proceedings of the 3rd international AutumnMeeting, Garzau, German Democrating Republic, October 8-13,1989

Gettering and defect engineering in the semiconductortechnology : GADEST '89 : proceedings of the 3rd international AutumnMeeting, Garzau, German Democrating Republic, October 8-13,1989 ed. by Martin Kittler - Brookfield SciTech Pub. 1989 - XI, 607 s. : ill.; 24 cm

Includes index

9783908044048


Electrical engineering--Materials
Getters
Semiconductors
Silicon crystals--Defects

541.3 KIT.6&7

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