Gettering and defect engineering in semiconductor technology XII : Gadest 2007 : proceedings of the 12th international autumn meeting, EMFCSC, Erice, Italy, October 14-19, 2007
Gettering and defect engineering in semiconductor technology XII : Gadest 2007 : proceedings of the 12th international autumn meeting, EMFCSC, Erice, Italy, October 14-19, 2007
edited by A. Cavallini . . . [et al. ]
- Zurich, Switerland Trans Tech Publications 2008
- xv, 642 p. : ill. ; 25 cm