Gettering and defect engineering in semiconductor technology XI : GADEST 2005 : proceedings of the 11th international autumn meeting : Giens, France, September 25-30, 2005
Gettering and defect engineering in semiconductor technology XI : GADEST 2005 : proceedings of the 11th international autumn meeting : Giens, France, September 25-30, 2005
edited by B. Pichaud . . . [et al. ]
- Zurich, Switerland Trans Tech Publications 2005
- xvi, 814 p. : ill. ; 25 cm