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Fundamental aspects of ultrathin dielectrics on Si-based devices

Fundamental aspects of ultrathin dielectrics on Si-based devices edited by Eric Garfunkel, Evgeni Gusev, and Alexander Vul' - Dordrecht ; Boston Kluwer Academic Publishers c1998 - x, 507 p. : ill. ; 25 cm

Includes bibliographical references and index

ISBN: 9780792350071

ISSN: 98004692

Subjects--Topical Terms:
Dielectric films - Congresses
Silicon-on-insulator technology - Congresses

Dewey Class. No.: 621.38152 GAR

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Fundamental aspects of ultrathin dielectrics on Si-based devices

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