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Fundamental aspects of silicon oxidation

Fundamental aspects of silicon oxidation Yves J. Chabal (ed.) - Berlin Springer c2001 - xiii, 260 p. : ill. (some col.) ; 24 cm

Includes bibliographical references and index

ISBN: 9783540416821

ISSN: 2001020054

Subjects--Topical Terms:
Silicon oxide

Dewey Class. No.: 546.6832 CHA

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Fundamental aspects of silicon oxidation

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