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Functional integration of opto-electro-mechanical devices and systems : 24-25 January 2001, San Jose, USA

Functional integration of opto-electro-mechanical devices and systems : 24-25 January 2001, San Jose, USA Michael R. Descour, Juha T. Rantala, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering - Bellingham, WA SPIE c2001.s - xxx, 152 p. : ill. ; 28 cm

Includes bibliographical references and index

ISBN: 9780819439628

ISSN: 2002265872

Subjects--Topical Terms:
Microelectromechanical systems - Congresses
Microelectronic packaging - Congresses
Optoelectronic devices - Congresses

Dewey Class. No.: 621.381 DES

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Functional integration of opto-electro-mechanical devices and systems : 24-25 January 2001, San Jose, USA

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