Fourth international symposium on laser precision microfabrication : 21-24 June, 2003, Munich, Germany
Fourth international symposium on laser precision microfabrication : 21-24 June, 2003, Munich, Germany
Isamu Miyamoto ... [et al.] chairs/editors ; organized by JLPS--Japan Laser Processing Society ... [et al.] ; cooperating organizations JSPE--the Japan Society for Precision Engineering ... [et al.]
- Bellingham, WA SPIE 2003
- xv, 532 p. : ill. ; 28 cm
Includes bibliographical references and author index