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Nano- and microtechnology : materials, processes, packaging and systems : 16-18 December 2002, Melbourne, Australia

Nano- and microtechnology : materials, processes, packaging and systems : 16-18 December 2002, Melbourne, Australia Dinesh K. Sood, Ajay P. Malshe, Ryutaro Maeda, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cosponsored by RMIT University (Australia) ... [et al.] ; cooperating organizations, Swinburne University of Technology (Australia) ... [et al.] - Bellingham, WA SPIE c2002 - xi, 476 p. : ill. ; 28 cm

Includes bibliographical references and author index

ISBN: 9780819447319

ISSN: 2003278131

Subjects--Topical Terms:
Mechatronics - Congresses
Microelectromechanical systems - Congresses
Microelectronics - Congresses
Nanotechnology - Congresses

Dewey Class. No.: 621.381 SOO

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Nano- and microtechnology : materials, processes, packaging and systems : 16-18 December 2002, Melbourne, Australia

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