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Nano- and micro-metrology : 16-17 June 2005, Munich, Germany

Ottevaere, Heidi

Nano- and micro-metrology : 16-17 June 2005, Munich, Germany Heidi Ottevaere, Peter DeWolf, Diederik S. Wiersma; sponsored by SPIE Europe ; cooperating organizations, EOS--European Optical Society... [et al.] ; published by SPIE--the International Society for Optical Engineering - Bellingham, WA SPIE 2005 - 1 v. (various pagings) : ill. ; 28 cm

Includes bibliographical references and author index

ISBN: 9780819458582

ISSN: 2005284352

Subjects--Topical Terms:
Optical measurements - Congresses

Dewey Class. No.: 681.25 OTT

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Nano- and micro-metrology : 16-17 June 2005, Munich, Germany

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