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Nano- and micro-electromechanical systems : fundamentals of nano- and microengineering

Lyshevski, Sergey Edward

Nano- and micro-electromechanical systems : fundamentals of nano- and microengineering Sergey Edward Lyshevski - 2nd ed - Boca Raton, FL CRC Press 2005 - 722 p. : ill. ; 26 cm

Includes bibliographical references and index

ISBN: 9780849328381

ISSN: 2004057931

Subjects--Topical Terms:
Microelectromechanical systems
Nanotechnology

Dewey Class. No.: 621.381 LYS

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