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Fabrication of silicon microprobes for optical near-field applications

Minh, Phan Ngoc

Fabrication of silicon microprobes for optical near-field applications Phan Ngoc Minh, Ono Takahito, Esashi Masayoshi - Boca Raton, FL CRC Press 2002 - 180 p. : ill. ; 25 cm

Includes bibliographical references and index

ISBN: 9780849311543

ISSN: 2001043935

Subjects--Topical Terms:
Micromachining
Microprobe analysis
Near-field microscopy
Silicon

Dewey Class. No.: 621.36 MIN

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Fabrication of silicon microprobes for optical near-field applications

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