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ISBD view for: Fabrication and design of resonant microdevices
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Fabrication and design of resonant microdevices
Bahreyni, Behraad
Fabrication and design of resonant microdevices Behraad Bahreyni - Norwich, NY W. Andrew Inc c2008 - xiii, 181 p. : ill. ; 27 cm
Includes bibliographical references and index
ISBN:
9780815515777
ISSN:
2008017717
Subjects--Topical Terms:
Microelectromechanical systems - Design and construction
Microfabrication
Resonance
Dewey Class. No.:
621 BAH
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