Fabrication and design of resonant microdevices

Bahreyni, Behraad

Fabrication and design of resonant microdevices Behraad Bahreyni - Norwich, NY W. Andrew Inc c2008 - xiii, 181 p. : ill. ; 27 cm

Includes bibliographical references and index

9780815515777

2008017717


Microelectromechanical systems - Design and construction
Microfabrication
Resonance

621 BAH

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