Engineering thin films with ion beams, nanoscale diagnostics, and molecular manufacturing : 30-31 July 2001, San Diego, USA
Engineering thin films with ion beams, nanoscale diagnostics, and molecular manufacturing : 30-31 July 2001, San Diego, USA
Emile J. Knystautas, Wiley P. Kirk, Valerie Browning, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering
- Bellingham, WA SPIE c2001
- ix, 192 p. : ill. ; 28 cm
Includes bibliographical references and index
9780819441829
2002277824
Ion bombardment - Industrial applications - Congresses Molecular electronics - Congresses Thin films - Congresses Thin films - Effect of radiation on - Congresses