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Electronics and structures for MEMS II : 17-19 December, 2001, Adelaide, Australia

Electronics and structures for MEMS II : 17-19 December, 2001, Adelaide, Australia Neil W. Bergmann, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by U.S. Air Force Office of Scientific Research Asian Office of Aerospace Research and Development ... [et al.] ; cooperating organization, IEEE South Australia Section - Bellingham, WA SPIE c2001 - ix, 392 p. : ill. ; 28 cm

Includes bibliographical references and author index

ISBN: 9780819443212

ISSN: 2002277726

Subjects--Topical Terms:
Microelectromechanical systems - Congresses
Microelectronics - Congresses
Smart structures - Congresses

Dewey Class. No.: 621.381 BER

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Electronics and structures for MEMS II : 17-19 December, 2001, Adelaide, Australia

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