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Electrical characterization of silicon-on-insulator materials and devices

Cristoloveanu, Sorin

Electrical characterization of silicon-on-insulator materials and devices by Sorin Cristoloveanu and Sheng S. Li - Boston Kluwer Academic 1995 - xiv, 381 p; : ill. ; 25 cm

Includes bibliographical references and index

ISBN: 9780792395485

ISSN: 94043971

Subjects--Topical Terms:
Semiconductors - Design and construction
Semiconductors - Electric properties
Silicon-on-insulator technology

Dewey Class. No.: 621.38152 CRI

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Electrical characterization of silicon-on-insulator materials and devices

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