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Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV : 5-7 December 2007, Canberra, Australia

Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV : 5-7 December 2007, Canberra, Australia Hark Hoe Tan ... [et al.], editors ; sponsored by SPIE ; cosponsored by the Australian National University (Australia) ... [et al.] ; cooperating organizations, Research School of Physical Sciences and Engineering, Canberra (Australia) [and] Centre for Biomedical Engineering, Adelaide (Australia) - Bellingham, Wash SPIE c2008 - 1 v. (various pagings) : ill. ; 28 cm

Earlier conferences have title: Device and process technologies for MEMS, microelectronics, and photonics. Includes bibliographical references and index

ISBN: 9780819469717

ISSN: 2010483564

Subjects--Topical Terms:
Microelectromechanical systems - Congresses
Nanotechnology - Congresses
Photolithography - Congresses
Photomechanical processes - Congresses
Photonics - Congresses

Dewey Class. No.: 621.381 TAN

Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV : 5-7 December 2007, Canberra, Australia

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