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Defects in microelectronic materials and devices

Defects in microelectronic materials and devices edited by Daniel M. Fleetwood, Sokrates T. Pantelides, Ronald D. Schrimpf - Boca Raton, FL CRC Press 2009 - xvi, 753 p. : ill. ; 26 cm

Includes bibliographical references and index

ISBN: 9781420043761

ISSN: 2008018722

Subjects--Topical Terms:
Integrated circuits - Defects
Metal oxide semiconductor field-effect transistors - Testing
Microelectronics - Materials - Testing

Dewey Class. No.: 621.381 FLE

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