Data analysis and modeling for process control III : 23 February, 2006, San Jose, California, USA
Emami, Iraj
Data analysis and modeling for process control III : 23 February, 2006, San Jose, California, USA
Iraj Emami, Kenneth W. Tobin, Jr. ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMATECH, Inc
- Bellingham, WA SPIE c2006
- 1 v. (in various pagings) : ill. ; 28 cm
Includes bibliographical references and author index
9780819461988
2007296712
Intelligent control systems - Mathematical models - Congresses Manufacturing processes - Automatic control - Congresses Manufacturing processes - Mathematical models - Congresses Process control - Mathematical models - Congresses