Data analysis and modeling for process control III : 23 February, 2006, San Jose, California, USA

Emami, Iraj

Data analysis and modeling for process control III : 23 February, 2006, San Jose, California, USA Iraj Emami, Kenneth W. Tobin, Jr. ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMATECH, Inc - Bellingham, WA SPIE c2006 - 1 v. (in various pagings) : ill. ; 28 cm

Includes bibliographical references and author index

9780819461988

2007296712


Intelligent control systems - Mathematical models - Congresses
Manufacturing processes - Automatic control - Congresses
Manufacturing processes - Mathematical models - Congresses
Process control - Mathematical models - Congresses

629.895 EMA

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