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Cold plasma in materials fabrication : from fundamentals to applications

Grill, Alfred

Cold plasma in materials fabrication : from fundamentals to applications Alfred Grill - New York IEEE Press ; Institute of Electrical and Electronics Engineers c1994 - xiii, 257 p. : ill. ; 24 cm

Includes bibliographical references and index

ISBN: 780310551

ISSN: 93042135

Subjects--Topical Terms:
Low temperature plasmas
Manufacturing processes
Plasma engineering

Dewey Class. No.: 621.044 GRI

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