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Chemical vapor deposition polymerization : the growth and properties of parylene thin films

Fortin, Jeffrey B

Chemical vapor deposition polymerization : the growth and properties of parylene thin films by Jeffrey B. Fortin, Toh-Ming Lu - Deventer, The Netherlands ; Boston, MA Kluwer Academic Publishers c2004 - xvi, 102 p. : ill. ; 24 cm

Includes bibliographical references (p. [91]-99) and index

ISBN: 9781402076886

ISSN: 2003065275

Subjects--Topical Terms:
Chemical vapor deposition
Thin films

Dewey Class. No.: 621.38152 FOR

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Chemical vapor deposition polymerization : the growth and properties of parylene thin films

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