Modeling aspects in optical metrology II : 15-16 June 2009, Munich, Germany
Modeling aspects in optical metrology II : 15-16 June 2009, Munich, Germany
Harald Bosse, Bernd Bodermann, Richard M. Silver, editors ; sponsored by SPIE Europe ; cooperating organizations, EOS--European Optical Society [and] WLT--Wissenschaftliche Gesellschaft Lasertechnik e.V. (Germany)
- Bellingham, WA SPIE 2009
- 1 v. (various pagings) : ill. ; 28 cm
Includes bibliographical references and author index
9780819476739
2010459267
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