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Miniaturized systems with micro-optics and MEMS : 20-22 September 1999, Santa Clara, California

Miniaturized systems with micro-optics and MEMS : 20-22 September 1999, Santa Clara, California M.E. Motamedi, Rolf Goering, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology ... [et al.] - Bellingham, WA SPIE 1999 - viii, 426 p. : ill. ; 28 cm

Earlier conferences titled: Miniaturized systems with micro-optics and micromechanics. Includes bibliographical references and index

ISBN: 9780819434753

ISSN: 267602

Subjects--Topical Terms:
Integrated optics - Congresses
Microelectromechanical systems - Congresses
Micromechanics - Congresses
Miniature electronic equipment - Congresses
Optical scanners - Congresses

Dewey Class. No.: 621.3693 MOT

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Miniaturized systems with micro-optics and MEMS : 20-22 September 1999, Santa Clara, California

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