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Microsensors, MEMS, and smart devices

Gardner, J. W

Microsensors, MEMS, and smart devices Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim - Hoboken, NJ J. Wiley 2013 - xvi, 503 p. : ill. ; 25 cm

Includes bibliographical references and index

ISBN: 047186109X

ISSN: 2001024353

Subjects--Topical Terms:
Detectors
Intelligent control systems
Microelectromechanical systems

Dewey Class. No.: 621.381 GAR

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