Micromachining and microfabrication process technology VIII : 27-29 January, 2003, San Jose, California, USA
Micromachining and microfabrication process technology VIII : 27-29 January, 2003, San Jose, California, USA
John A. Yasaitis, Mary Ann Perez-Maher, Jean Michel Karam, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]
- Bellingham, WA SPIE 2003
- ix, 604 p. : ill. ; 28 cm
Includes bibliographical references and author index
9780819447791
2004296874
Electromechanical devices - Design and construction - Congresses Microfabrication - Congresses Micromachining - Congresses