Micromachining and microfabrication process technology and devices : 7-9 November 2001, Nanjing, China

Micromachining and microfabrication process technology and devices : 7-9 November 2001, Nanjing, China Norman C. Tien, Qing-An Huang, chairs/editors ; sponsored and organized by SPIE--the International Society for Optical Engineering, SEU--Southeast University (China), [and] COEMA--China Optics and Optoelectronics Manufacturers Association ; cooperating organizations, Electronic Society, Jiangsu Province (China) [and] Laser and Optical Engineering Society, Jiangsu Province (China) - Bellingham, WA SPIE c2001 - xi, 440 p. : ill. ; 30 cm

Includes bibliographical references and index

9780819443403

2002282193


Electromechanical devices - Design and construction - Congresses
Microfabrication - Congresses
Micromachining - Congresses

671.35 TIE

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