Micromachining and microfabrication process technology and devices : 7-9 November 2001, Nanjing, China
Micromachining and microfabrication process technology and devices : 7-9 November 2001, Nanjing, China
Norman C. Tien, Qing-An Huang, chairs/editors ; sponsored and organized by SPIE--the International Society for Optical Engineering, SEU--Southeast University (China), [and] COEMA--China Optics and Optoelectronics Manufacturers Association ; cooperating organizations, Electronic Society, Jiangsu Province (China) [and] Laser and Optical Engineering Society, Jiangsu Province (China)
- Bellingham, WA SPIE c2001
- xi, 440 p. : ill. ; 30 cm
Includes bibliographical references and index
9780819443403
2002282193
Electromechanical devices - Design and construction - Congresses Microfabrication - Congresses Micromachining - Congresses