Micromachined ultrasound-based proximity sensors

Hornung, Mark R

Micromachined ultrasound-based proximity sensors Mark R. Hornung, Oliver Brand - Boston Kluwer Academic 1999 - xii, 120 p. : ill. ; 25 cm

Includes bibliographical references (p. [111]-118) and index

9780792385080

99020175


Microelectromechanical systems
Proximity detectors
Ultrasonic transducers

681.25 HOR

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