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Micromachined devices and components VI : 18-19 September 2000, Santa Clara, USA

Micromachined devices and components VI : 18-19 September 2000, Santa Clara, USA Eric Peeters, Oliver Paul, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA) - Bellingham, WA SPIE c2000 - viii, 282 p. : ill. ; 28 cm

Includes bibliographical references and index

ISBN: 9780819438324

ISSN: 2001267697

Subjects--Topical Terms:
Electromechanical devices - Congresses
Micromachining - Congresses
Micromechanics - Congresses

Dewey Class. No.: 620.5 PEE

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Micromachined devices and components VI : 18-19 September 2000, Santa Clara, USA

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