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Microfabrication and nanomanufacturing

Microfabrication and nanomanufacturing edited by Mark J. Jackson - Boca Raton, FL ; New York CRC Taylor & Francis 2006 - [xii], 401 p. : ill. ; 27 cm

Includes bibliographical references and index

ISBN: 9780824724313

ISSN: 2005049275

Subjects--Topical Terms:
Integrated circuits - Design and construction
Microelectromechanical systems - Design and construction
Microelectronics

Dewey Class. No.: 620.5 JAC

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