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Microelectronic device technology III : 22-23 September 1999, Santa Clara, California

Microelectronic device technology III : 22-23 September 1999, Santa Clara, California David Burnett, Toshiaki Tsuchiya, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, the Electrochemical Society ... [et al.] - Bellingham, WA SPIE c1999 - ix, 304 p. : ill. ; 28 cm

Includes bibliographical references and index

ISBN: 9780819434784

ISSN: 2002265194

Subjects--Topical Terms:
Microelectronics - Congresses
Semiconductors - Congresses
Semiconductors - Design and construction - Congresses

Dewey Class. No.: 621.38152 BUR

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Microelectronic device technology III : 22-23 September 1999, Santa Clara, California

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