MEMS and microsystems : design, manufacture, and nanoscale engineering Tai-Ran Hsu

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Publication details: Hoboken, NJ John Wiley 2008Edition: 2nd edDescription: xxv, 550 p. : ill. ; 25 cmISBN:

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Item type	Current library	Call number	Materials specified	Status	Barcode
English Books	Anna Centenary Library	621.381 HSU (Browse shelf(Opens below))	hbk	Available	127294

Includes bibliographical references (p. 509-521) and index

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