23rd Annual Bacus Symposium On Photomask Technology : 9-12 September, 2003, Monterey, California, Usa / edited by Kurt R. Kimmel, Wolfgang Staud

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Series: Proceedings of SPIE--the International Society for Optical Engineering ; v. 5256Publication details: Bellingham Spie C2003Edition: 1st edDescription: xvi, 1362 p. : ill. some color ; 28 cmISBN:

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Item type	Current library	Status	Barcode
Reference	Anna Centenary Library 6TH FLOOR, B WING	Not for loan	276675

Includes bibliographies and index

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